Differently Pumped Rotary Feedthrough
Description
The Differentially Pumped Rotary Feedthrough provides 360° of continuous rotary freedom through the vacuum wall of a UHV system. The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on special sealing surfaces. A preloaded ball bearing set accurately controls the rotating stage position.
Application
The Differentially Pumped Rotary Feedthrough can be combined with manipulators and any other precision positioning devices.
Additional information
The feedthroughs are equipped with worm drive fine adjust providing fine angle adjustment. They are available with an anti-backlash stepper motor.
Technical data
Resolution (handwheel/ motorised/optically controlled) |
1º/0.1º/0.005º |
Operating temperature | –20 to +60°C |
Bakeout temperature | 150°C |
Positional control | Handwheel or stepping motor |
Base flange | DN 40CF |
Base flange | DN 63CF |
Base flange | DN 100CF |
Base flange | DN 160CF |
Base flange | DN 200CF |