Ion Source 40C1
The Ion Source IS 40C1 is a compact, easy-to-use extractor type ion gun for sample surface cleaning. The source generates an ion current of >70μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (standard – 63 mm).
Features
- Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
- High Ion Beam Current
- Long lifetime
- High stability
- Software control (basic version)
Options
- Software extension – can be integrated with RAPID SE
- Gas dosing system
- Customised insertion length
- Linear shift
Technical data
Mounting flange: | DN 40CF |
Bakeout temperature: | 250°C |
Water cooling: | Not required |
Current density | > 120 μA/cm2 (for distance 30 mm) |
Insertion length: | min. 63 mm, others on request, OD: 35mm |
Energy range: | 0.12 keV – 5 keV |
Spot size: | 3 mm for distance 30 mm (dependent on working distance) |
Cathode type: | Yttrium oxide coated Iridium filament |